Heterodyne interferometer for measurement of linear displacements of a rough sample

Tomasz S. Tkaczyk; Romulad Jozwicki

doi:10.1117/12.301329

1 January 1998 Heterodyne interferometer for measurement of linear displacements of a rough sample

Tomasz S. Tkaczyk, Romulad Jozwicki

Proceedings Volume 3320, Tenth Polish-Czech-Slovak Optical Conference: Wave and Quantum Aspects of Contemporary Optics; (1998) https://doi.org/10.1117/12.301329
Event: Tenth Polish-Czech-Slovak Optical Conference: Wave and Quantum Aspects of Contemporary Optics, 1996, Karpacz, Poland

Abstract

Theoretical background of a heterodyne interferometer to measure linear displacements of a rough surface is presented. The surface of a sample is illuminated by two laser beams having mutually slightly shifted frequencies by using acousto- optic modulators. The essential parameters of the system measuring in-plane and out-of-plane displacement are discussed.

Citation Download Citation

Tomasz S. Tkaczyk and Romulad Jozwicki "Heterodyne interferometer for measurement of linear displacements of a rough sample", Proc. SPIE 3320, Tenth Polish-Czech-Slovak Optical Conference: Wave and Quantum Aspects of Contemporary Optics, (1 January 1998); https://doi.org/10.1117/12.301329

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