Vertical-cavity surface-emitting lasers fabricated using a sealing of AlAs against wet oxidation

Dae-Ho Lim; Gye Mo Yang; Jong Hee Kim; Kee Young Lim; Hyung Jae Lee

doi:10.1117/12.305450

20 April 1998 Vertical-cavity surface-emitting lasers fabricated using a sealing of AlAs against wet oxidation

Dae-Ho Lim, Gye Mo Yang, Jong Hee Kim, Kee Young Lim, Hyung Jae Lee

Proceedings Volume 3286, Vertical-Cavity Surface-Emitting Lasers II; (1998) https://doi.org/10.1117/12.305450
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

We have studied the process of sealing on exposed. AlAs and the wet oxidation behavior of AlAs to prevent further wet oxidation. A critical processing step consists of the formation of an oxide surface barrier by the first set oxidation for a short time at 390-430 degrees C in the stream environment of previously room-ambient exposed AlAs surface. During this brief wet oxidation,a dense oxide barrier with a thickness of approximately 1 micrometers is formed, which further blocks diffusing oxygen species during the second wet oxidation. The oxide surface barriers of approximately 1 micrometers thickness formed at 408 degrees C and 410 degrees C have shown the best effectiveness of sealing against further wet oxidation. The effectiveness of the sealing is demonstrated through its use as a mask against wet oxidation in the fabrication of oxide-confirmed vertical-cavity surface-emitting lasers.

Citation Download Citation

Dae-Ho Lim, Gye Mo Yang, Jong Hee Kim, Kee Young Lim, and Hyung Jae Lee "Vertical-cavity surface-emitting lasers fabricated using a sealing of AlAs against wet oxidation", Proc. SPIE 3286, Vertical-Cavity Surface-Emitting Lasers II, (20 April 1998); https://doi.org/10.1117/12.305450

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