Visible electroluminescence from pulsed-laser-annealed a-Si:H/a-SiNx:H superlattices on silicon wafer

Mingxiang Wang; Xinfan Huang; Wei Li; Jun Xu; Kun-Ji Chen; Qimin Wang

doi:10.1117/12.298218

12 January 1998 Visible electroluminescence from pulsed-laser-annealed a-Si:H/a-SiN_x:H superlattices on silicon wafer

Mingxiang Wang, Xinfan Huang, Wei Li, Jun Xu, Kun-Ji Chen, Qimin Wang

Proceedings Volume 3278, Integrated Optic Devices II; (1998) https://doi.org/10.1117/12.298218
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

Plasma enhanced chemical vapor deposited a-Si:H/a-SIN_x:H superlattices on silicon wafers were annealed by KrF excimer pulsed laser. Room temperature visible electroluminescence (EL) was successfully realized from these silicon-based superlattices structures with quite low threshold biased value 3.0V. It is a promising new way, in which all procedures are compatible with current silicon ULSI technology, to the realization of opto-electronic devices different from the porous silicon. Luminescent properties of samples with different laser annealing energy densities were compared and a preferred annealing condition was given.

Citation Download Citation

Mingxiang Wang, Xinfan Huang, Wei Li, Jun Xu, Kun-Ji Chen, and Qimin Wang "Visible electroluminescence from pulsed-laser-annealed a-Si:H/a-SiN_x:H superlattices on silicon wafer", Proc. SPIE 3278, Integrated Optic Devices II, (12 January 1998); https://doi.org/10.1117/12.298218

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available