MEMS-based diffractive optical-beam-steering technology

David A. Winick; Bruce E. Duewer; Som Chaudhury; John M. Wilson; John Tucker; Umut Eksi; Paul D. Franzon

doi:10.1117/12.302411

15 March 1998 MEMS-based diffractive optical-beam-steering technology

David A. Winick, Bruce E. Duewer, Som Chaudhury, John M. Wilson, John Tucker, Umut Eksi, Paul D. Franzon

Proceedings Volume 3276, Miniaturized Systems with Micro-Optics and Micromechanics III; (1998) https://doi.org/10.1117/12.302411
Event: Optoelectronics and High-Power Lasers and Applications, 1998, San Jose, CA, United States

Abstract

This paper presents some results from phase-1 research into developing a beam steerer based on micro-mechanical diffractive elements. The position of these elements is electrostatically controlled, to allow dynamic programming of a 2D phase function. Feasibility prototypes were constructed in the MUMPs polysilicon surface micromachine process.

Citation Download Citation

David A. Winick, Bruce E. Duewer, Som Chaudhury, John M. Wilson, John Tucker, Umut Eksi, and Paul D. Franzon "MEMS-based diffractive optical-beam-steering technology", Proc. SPIE 3276, Miniaturized Systems with Micro-Optics and Micromechanics III, (15 March 1998); https://doi.org/10.1117/12.302411

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