Depth profiling of polishing-induced contamination on fused silica surfaces

Mark R. Kozlowski; Jeff Carr; Ian D. Hutcheon; Richard A. Torres; Lynn Matthew Sheehan; David W. Camp; Ming Yan

doi:10.1117/12.307031

20 April 1998 Depth profiling of polishing-induced contamination on fused silica surfaces

Mark R. Kozlowski, Jeff Carr, Ian D. Hutcheon, Richard A. Torres, Lynn Matthew Sheehan, David W. Camp, Ming Yan

Proceedings Volume 3244, Laser-Induced Damage in Optical Materials: 1997; (1998) https://doi.org/10.1117/12.307031
Event: Laser-Induced Damage in Optical Materials: 1997, 1997, Boulder, CO, United States

Abstract

Laser-induced damage on optical surfaces is often associated with absorbing contaminants introduced by the polishing process. This is particularly the case for UV optics. In the present study, secondary ion mass spectroscopy (SIMS) was used to measure depth profiles of finishing-process contamination on fused silica surfaces. Contaminating detected include the major polishing compound components, Al present largely because of the use of Al₂O₃ in the final cleaning process, and other metals incorporated during the polishing step or earlier grinding steps. Depth profile data typically showed an exponential decay of contaminant concentration to a depth of 100-200 nm. This depth is consistent with a polishing redeposition layers formed during the chemo-mechanical polishing of fused silica. Peak contaminant levels are typically in the 10-10 pm range, except for Al which often exceeds 1000 ppm.

Citation Download Citation

Mark R. Kozlowski, Jeff Carr, Ian D. Hutcheon, Richard A. Torres, Lynn Matthew Sheehan, David W. Camp, and Ming Yan "Depth profiling of polishing-induced contamination on fused silica surfaces", Proc. SPIE 3244, Laser-Induced Damage in Optical Materials: 1997, (20 April 1998); https://doi.org/10.1117/12.307031

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available