Is mask repair economic?

Wayne Smith

doi:10.1117/12.301226

12 February 1997 Is mask repair economic?

Wayne Smith

Proceedings Volume 3236, 17th Annual BACUS Symposium on Photomask Technology and Management; (1997) https://doi.org/10.1117/12.301226
Event: 17th Annual BACUS Photomask Technology and Management, 1997, Redwood City, CA, United States

Abstract

Mask repair cost's impact on mask cost is studied. The study focuses on 0.35 (mu) through 0.18 (mu) technology generations. General economic observations on mask repair are made. The study was conducted using a commercial cost of ownership model with sensitivity analysis conducted on salient parameters.

Citation Download Citation

Wayne Smith "Is mask repair economic?", Proc. SPIE 3236, 17th Annual BACUS Symposium on Photomask Technology and Management, (12 February 1997); https://doi.org/10.1117/12.301226

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