Photofabrication of the third dimension of NiTi shape memory alloy microactuators

David M. Allen; Tony Leong; Siang H. Lim; Manfred Kohl

doi:10.1117/12.284549

2 September 1997 Photofabrication of the third dimension of NiTi shape memory alloy microactuators

David M. Allen, Tony Leong, Siang H. Lim, Manfred Kohl

Proceedings Volume 3225, Microlithography and Metrology in Micromachining III; (1997) https://doi.org/10.1117/12.284549
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

This paper describes experimental results of using various microlithography techniques to fabricate a range of microactuator devices from NiTi shape memory alloys. The range of products includes: planar double-beams form rolled foils etched form both sides; tapered double-beams; planar double beams from sputter-deposited films etched rom one side; a tubular test piece. Such photofabrication in not easily achieved and problems discussed in this paper include: achieving acceptable edge profiles through the thickness of the materials while maintaining high etch factors; tapering foil microactuators by means of chemical micro milling; coating NiTi tubes with electrophoretic photoresist; imaging a curved surface with a small radius of curvature; control of etching parameters for a constant rate of etch; the influence of NiTi oxide coatings on etching and; technical comparisons with other potential manufacturing processes.

Citation Download Citation

David M. Allen, Tony Leong, Siang H. Lim, and Manfred Kohl "Photofabrication of the third dimension of NiTi shape memory alloy microactuators", Proc. SPIE 3225, Microlithography and Metrology in Micromachining III, (2 September 1997); https://doi.org/10.1117/12.284549

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