Accurate force measurements for miniature mechanical systems: a review of progress

Lowell P. Howard; Joseph Fu

doi:10.1117/12.284543

2 September 1997 Accurate force measurements for miniature mechanical systems: a review of progress

Lowell P. Howard, Joseph Fu

Proceedings Volume 3225, Microlithography and Metrology in Micromachining III; (1997) https://doi.org/10.1117/12.284543
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States

Abstract

A survey of nanonewton force calibration techniques suitable for micro-electromechanical systems (MEMS) is presented. The reviewed techniques include: mass-derived force, pendulums, calibrated master springs, resonance and electromagnetic techniques. Considerable background material is provided to support the hypothesis that virtual power methods, such as those employed on the NIST watt balance are applicable to the MEMS force calibration problem. A review of progress at NIST on two prototype nanowatt balances designed for MEMS calibrations is given.

Citation Download Citation

Lowell P. Howard and Joseph Fu "Accurate force measurements for miniature mechanical systems: a review of progress", Proc. SPIE 3225, Microlithography and Metrology in Micromachining III, (2 September 1997); https://doi.org/10.1117/12.284543

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