Automatic final inspection: an important nonexpensive control to guarantee long-term reliability

Friedbald Kiel; Guiseppe Balbo; Eyal Duzi; Olga Andrianaivo-Golz; Thomas Kohnen

doi:10.1117/12.284687

11 September 1997 Automatic final inspection: an important nonexpensive control to guarantee long-term reliability

Friedbald Kiel, Guiseppe Balbo, Eyal Duzi, Olga Andrianaivo-Golz, Thomas Kohnen

Proceedings Volume 3216, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III; (1997) https://doi.org/10.1117/12.284687
Event: Microelectronic Manufacturing, 1997, Austin, TX, United States

Abstract

After final electrical tests of microchips, an additional visual inspection is performed to guarantee their long term reliability. This step is time consuming and highly labour intensive. To reduce costs, and to improve at the same time the defect density monitoring using a higher sampling rate, the final visual inspection performed manually by operators, is replaced by an automatic inspection. This paper illustrates how the high sampling rate of a automatic final inspection may be used for better defect monitoring through final insulator layers, monitoring underlying metal layers as well.

Citation Download Citation

Friedbald Kiel, Guiseppe Balbo, Eyal Duzi, Olga Andrianaivo-Golz, and Thomas Kohnen "Automatic final inspection: an important nonexpensive control to guarantee long-term reliability", Proc. SPIE 3216, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III, (11 September 1997); https://doi.org/10.1117/12.284687

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