Paper
29 December 1997 Near-field light microscopy with SEM light generation
Vil B. Baiburin, Nikolai P. Konnov, Anatolyi A. Shcherbakov, Alina N. Malakhaeva, Yuri P. Volkov
Author Affiliations +
Abstract
A new near field light microscope with SEM light generation (NFLEM) has been developed on the basis of modified SEM (Hitachi HU-12A). The scanning electron beam of the SEM passed through thin luminescent film coating a sample generates a small light spot. The light transmitted through the sample is registered by PMT. The wavelength of the light can be easily modified (from infrared to x-ray) by changing the luminescent film. The images of test objects (latex 0.1 micrometer, thin metal films) are obtained by the microscope.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vil B. Baiburin, Nikolai P. Konnov, Anatolyi A. Shcherbakov, Alina N. Malakhaeva, and Yuri P. Volkov "Near-field light microscopy with SEM light generation", Proc. SPIE 3197, Optical Biopsies and Microscopic Techniques II, (29 December 1997); https://doi.org/10.1117/12.297977
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KEYWORDS
Scanning electron microscopy

Electron beams

Near field scanning optical microscopy

Light sources

Thin films

Latex

Microscopes

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