Phase-shifting interferometer for surface inspection

Siu Chung Tam; Beng-Yew Low; Hock-Chuan Chua; Anthony Tung Shuen Ho; Wah-Peng Neo

doi:10.1117/12.284036

18 August 1997 Phase-shifting interferometer for surface inspection

Siu Chung Tam, Beng-Yew Low, Hock-Chuan Chua, Anthony Tung Shuen Ho, Wah-Peng Neo

Proceedings Volume 3185, Automatic Inspection and Novel Instrumentation; (1997) https://doi.org/10.1117/12.284036
Event: ISMA '97 International Symposium on Microelectronics and Assembly, 1997, Singapore, Singapore

Abstract

A phase-shifting Twyman-Green interferometer has been constructed. Using three consecutively captured interferograms, the phase profile of a reflective surface can be determined. Results using various fringe processing techniques are compared. These methods include uniform averaging, Gaussian mask and spin filtering. For simulated fringes superimposed with random noise and fixed-pattern noise, it has been observed that a combination of weighted averaging and spin filtering could generate the best results. The computerized system has been applied to the measurement of the form errors of a silicon wafer and a cosmetic mirror, respectively. The root-mean-square error of the wafer is determined to be 11.13 nm.

Citation Download Citation

Siu Chung Tam, Beng-Yew Low, Hock-Chuan Chua, Anthony Tung Shuen Ho, and Wah-Peng Neo "Phase-shifting interferometer for surface inspection", Proc. SPIE 3185, Automatic Inspection and Novel Instrumentation, (18 August 1997); https://doi.org/10.1117/12.284036

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