Nanosize microstructure formation by anodizing the thin film structures

V. M. Parkoun; N. P. Petrov; L. M. Lynkov

doi:10.1117/12.276249

13 June 1997 Nanosize microstructure formation by anodizing the thin film structures

V. M. Parkoun, N. P. Petrov, L. M. Lynkov

Proceedings Volume 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology; (1997) https://doi.org/10.1117/12.276249
Event: XII Conference on Solid State Crystals: Materials Science and Applications, 1996, Zakopane, Poland

Abstract

Application of controlled local dissolution of multilayer thin film systems during electrochemical anodizing for forming of ordered nanosized structures is proposed. For producing approximately equals 0.1 micrometers microbulger systems the refractory metal (RM) - Al bilayer structures structures were used. Microbulgers of RM were obtained by anodizing bilayer structures. Microbulgers are shaped as Al₂O₃ pores, have 0.3 micrometers height and 4000 microbulgers/micrometers ² density. The degree of their ordering is estimated and determined using mathematical morphology operation erosion and dilation.

Citation Download Citation

V. M. Parkoun, N. P. Petrov, and L. M. Lynkov "Nanosize microstructure formation by anodizing the thin film structures", Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); https://doi.org/10.1117/12.276249

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