Lithium niobate as the substratum for the SAW acceleration sensor

Jerzy Filipiak; Lech Solarz; Jerzy Ostrowski; Cezary Kopycki

doi:10.1117/12.276234

13 June 1997 Lithium niobate as the substratum for the SAW acceleration sensor

Jerzy Filipiak, Lech Solarz, Jerzy Ostrowski, Cezary Kopycki

Proceedings Volume 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology; (1997) https://doi.org/10.1117/12.276234
Event: XII Conference on Solid State Crystals: Materials Science and Applications, 1996, Zakopane, Poland

Abstract

Some aspects of the design of SAW acceleration sensors are investigated. The principles of operation are briefly reassumed. Our studies reveal that the cantilever beam is the optimum mechanical structure for the device. The calculations and experiments allow to determine the limits of applicability of lithium niobate as the substratum for the SAW acceleration sensor.

Citation Download Citation

Jerzy Filipiak, Lech Solarz, Jerzy Ostrowski, and Cezary Kopycki "Lithium niobate as the substratum for the SAW acceleration sensor", Proc. SPIE 3179, Solid State Crystals in Optoelectronics and Semiconductor Technology, (13 June 1997); https://doi.org/10.1117/12.276234

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