Nature of distortions of the surface pattern produced by precise electron-beam processing of insulators

Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfeld

doi:10.1117/12.287815

25 September 1997 Nature of distortions of the surface pattern produced by precise electron-beam processing of insulators

Anatoly M. Filachev, Boris I. Fouks, Dmitrii E. Greenfeld

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Proceedings Volume 3155, Charged Particle Optics III; (1997) https://doi.org/10.1117/12.287815
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The paper deals with the problems that appear in the electron- beam processing of insulators and consist in distortion of the surface pattern created by an electron beam. There are presented the results of theoretical and experimental studies on the phenomena in insulators, which are powered by the electron-beam processing of their surfaces, and the effect of these phenomena on the precision of the processing.

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Anatoly M. Filachev, Boris I. Fouks, and Dmitrii E. Greenfeld "Nature of distortions of the surface pattern produced by precise electron-beam processing of insulators", Proc. SPIE 3155, Charged Particle Optics III, (25 September 1997); https://doi.org/10.1117/12.287815

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