Reducing vibration effects in phase-shifting interferometry

Leslie L. Deck

doi:10.1117/12.287746

25 September 1997 Reducing vibration effects in phase-shifting interferometry

Leslie L. Deck

Proceedings Volume 3100, Sensors, Sensor Systems, and Sensor Data Processing; (1997) https://doi.org/10.1117/12.287746
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

A method to reduce the sensitivity of phase-shifting interferometry to external vibrations without sacrificing lateral resolution is described. The returning interferogram is amplitude split to form two series of interferograms; a fast sampled, low spatial resolution data set and a slow sampled, high spatial resolution data set. The fast sampled set is used to calculate the true phase increment between intensity measurements in the high spatial resolution data set and a generalized phase extraction algorithm then uses these phase increments when calculating the topographical phases for this set. The measured topography thereby benefits from the best qualities of both data sets, providing increased vibration immunity without sacrificing high spatial resolution.

Citation Download Citation

Leslie L. Deck "Reducing vibration effects in phase-shifting interferometry", Proc. SPIE 3100, Sensors, Sensor Systems, and Sensor Data Processing, (25 September 1997); https://doi.org/10.1117/12.287746

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available