Photomask fabrication feasibility for next-generation reticle format

Mikio Katsumata; Hiroichi Kawahira; Satoru Nozawa

doi:10.1117/12.277253

28 July 1997 Photomask fabrication feasibility for next-generation reticle format

Mikio Katsumata, Hiroichi Kawahira, Satoru Nozawa

Proceedings Volume 3096, Photomask and X-Ray Mask Technology IV; (1997) https://doi.org/10.1117/12.277253
Event: Photomask Japan '97, 1997, Kawasaki City, Japan

Abstract

A next reticle format is considered from a view point of photomask fabrication process. In order to determine optimal reticle thickness corresponding to 230 mm size, processes feasibility for the thickness are examined. Cr dry etching is studied in terms of plasma condition and patterning accuracy. It is found that Cr dry etching with accurate critical dimension (CD) control is possible with substrate as thick as 12.7 mm. Post exposure bake (PEB) process for chemically amplified (CA) resists is also examined in terms of CD uniformity on substrates. Relationship of substrate thickness and CD uniformity is estimated with PEB controllability and CA resists characteristics. In addition to this, it is demonstrated that actual temperature uniformity for substrate with a thickness of 9 mm is equivalent to that for a present thickness of 6.35 mm. From these results in overall, it is proposed that substrate thickness of 9 mm is feasible for actual photomask production.

Citation Download Citation

Mikio Katsumata, Hiroichi Kawahira, and Satoru Nozawa "Photomask fabrication feasibility for next-generation reticle format", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); https://doi.org/10.1117/12.277253

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available