ArF excimer-laser exposure durability of chromium-fluoride-attenuated phase-shift masks

Yuko Seki; Jun Ushioda; Takashi Saito; Katsumi Maeda; Kaichiro Nakano; Shigeyuki Iwasa; Takeshi Ohfuji; Hiroshi Tanabe

doi:10.1117/12.277260

28 July 1997 ArF excimer-laser exposure durability of chromium-fluoride-attenuated phase-shift masks

Yuko Seki, Jun Ushioda, Takashi Saito, Katsumi Maeda, Kaichiro Nakano, Shigeyuki Iwasa, Takeshi Ohfuji, Hiroshi Tanabe

Proceedings Volume 3096, Photomask and X-Ray Mask Technology IV; (1997) https://doi.org/10.1117/12.277260
Event: Photomask Japan '97, 1997, Kawasaki City, Japan

Abstract

The exposure durability of chromium fluoride (CrF) was evaluated for phase shifter material in ArF excimer laser lithography. The film quality changes after 193 nm light irradiation were measured by using an optical spectroscope, an x-ray photoelectron spectroscopy (XPS), and an atomic force microscope (AFM). The film quality changes, such as decline of transmittance, surface oxidation, and roughness, were occurred in the sample irradiated in air, while little change were observed in nitrogen atmosphere.

Citation Download Citation

Yuko Seki, Jun Ushioda, Takashi Saito, Katsumi Maeda, Kaichiro Nakano, Shigeyuki Iwasa, Takeshi Ohfuji, and Hiroshi Tanabe "ArF excimer-laser exposure durability of chromium-fluoride-attenuated phase-shift masks", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); https://doi.org/10.1117/12.277260

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available