0.35-um i-line attenuated phase-shift mask (PSM) repair by focused-ion-beam technology

Mark L. Raphaelian; M. F. Ellis; David C. Ferranti; Diane K. Stewart

doi:10.1117/12.277283

28 July 1997 0.35-μm i-line attenuated phase-shift mask (PSM) repair by focused-ion-beam technology

Mark L. Raphaelian, M. F. Ellis, David C. Ferranti, Diane K. Stewart

Proceedings Volume 3096, Photomask and X-Ray Mask Technology IV; (1997) https://doi.org/10.1117/12.277283
Event: Photomask Japan '97, 1997, Kawasaki City, Japan

Abstract

This paper addresses the capabilities of the Micrion 8000 FIB (focused ion beam) phase shift mask repair tool to repair clear defects and opaque defects found on chrome-based binary and attenuated phase shift masks, and MoSi-based attenuated phase shift masks for 0.35 micrometer lithography. For a repair to be successful, the repair must: match size, shape, and position of the defect, reproduce the desired transmission, minimize damage to the underlying substrate, minimize damage to surrounding non-defect areas, and finally, the repair must be durable. For the production environment, a repair tool must be very reliable and easy to use as well. The Micrion 8000 FIB phase shift mask repair tool incorporates the above requirements.

Citation Download Citation

Mark L. Raphaelian, M. F. Ellis, David C. Ferranti, and Diane K. Stewart "0.35-μm i-line attenuated phase-shift mask (PSM) repair by focused-ion-beam technology", Proc. SPIE 3096, Photomask and X-Ray Mask Technology IV, (28 July 1997); https://doi.org/10.1117/12.277283

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