Interactions of pulsed UV laser with polymer surfaces: periodic structures, functional group alignment, and diamond deposition

Hiroyuki Hiraoka; Winnie Y. Y. Wong; Tat Ming Wong

doi:10.1117/12.271675

4 April 1997 Interactions of pulsed UV laser with polymer surfaces: periodic structures, functional group alignment, and diamond deposition

Hiroyuki Hiraoka, Winnie Y. Y. Wong, Tat Ming Wong

Author Affiliations +

Proceedings Volume 3093, Nonresonant Laser-Matter Interaction (NLMI-9); (1997) https://doi.org/10.1117/12.271675
Event: Nonresonant Laser-Matter Interaction, 1996, St. Petersburg, Russian Federation

Abstract

Pulsed, polarized UV-laser irradiation of polymers at 266 and 355 nm with Nd:YAG laser source gave rise not only to periodic structures of 100 nm dimension but also functional group alignments in periodic structures which were studied with a polarized reflected FT-IR spectrophotometer. The results arising from interference of scattered light on the surface and incoming polarized pulsed laser beams were demonstrated with poly(ethylene terephthalate), polyimides, polysulfones, polystyene and doped polyimides films. Images of polymer periodic structures were transferred to silicon surfaces by series of reactive ion etchings. Si patterns with 100 nm line and spacing with vertical wall profile were fabricated in a large area. On such Si surfaces diamond crystals were deposited from polymer plumes generated by ArF excimer laser irradiated in 193 nm on poly(methyl methacrylate). The diamond crystals deposited in this way have a very sharp Raman peak at 1332.9 cm^-1 with FWHM equals 1.2 cm^-1 to 14 cm^-1 depending on location on the substrate Si wafer.

Citation Download Citation

Hiroyuki Hiraoka, Winnie Y. Y. Wong, and Tat Ming Wong "Interactions of pulsed UV laser with polymer surfaces: periodic structures, functional group alignment, and diamond deposition", Proc. SPIE 3093, Nonresonant Laser-Matter Interaction (NLMI-9), (4 April 1997); https://doi.org/10.1117/12.271675

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available