Ion shower doping system for TFT-LCDs

Ichiro Nakamoto; Hajime Kuwabara; Yoshinori Kawasaki

doi:10.1117/12.270297

10 April 1997 Ion shower doping system for TFT-LCDs

Ichiro Nakamoto, Hajime Kuwabara, Yoshinori Kawasaki

Proceedings Volume 3014, Active Matrix Liquid Crystal Displays Technology and Applications; (1997) https://doi.org/10.1117/12.270297
Event: Electronic Imaging '97, 1997, San Jose, CA, United States

Abstract

Recently, improvement of LCD of TFT toward more large-size and high-density are carried on. And, improvement of yield and operation rate are required for a manufacturing equipment. Ion shower doping technique which is impurity doping for silicon thin film for making source/drain region become attractive. It has unique characters which are different form conventional ion implantation system. Its ion beam is without mass separation technique which is used by conventional ion implanter. And ions are implanted into whole area of glass substrate without beam scanning.This system is able to irradiate ion beam which current density is 20uA/cm$2. Implantation which dose is 1 X 10¹⁶ cm^-2 is finished for about 80s. Next, we discuss new types of ion source for ion shower doping system. It is pointed that temperature rising of substrate is a severe problem for resist process. Conventional system uses typically 5 percent PH₃ gas diluted with hydrogen gas. So, hydrogen ion in ion beam is extra heat source. If we can remove hydrogen ion, substrate temperature decrease. New type ion source can prevent extraction of hydrogen ion from ion source plasma. For preliminary examinations, increased phosphorous ratio in ion beam is up to about 80 percent.

Citation Download Citation

Ichiro Nakamoto, Hajime Kuwabara, and Yoshinori Kawasaki "Ion shower doping system for TFT-LCDs", Proc. SPIE 3014, Active Matrix Liquid Crystal Displays Technology and Applications, (10 April 1997); https://doi.org/10.1117/12.270297

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available