Tapping mode scanning capacitance microscopy: feasibility of quantitative capacitance measurement

Kazuya Goto; Kazuhiro Hane

doi:10.1117/12.271216

15 April 1997 Tapping mode scanning capacitance microscopy: feasibility of quantitative capacitance measurement

Kazuya Goto, Kazuhiro Hane

Proceedings Volume 3009, Micromachining and Imaging; (1997) https://doi.org/10.1117/12.271216
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Tapping mode scanning capacitance microscopy is a new technique to study local capacitances. It is a combination of the tapping mode scanning force microscopy and the scanning capacitance microscopy. With the tapping motion of the tip, tip-sample distance is accurately regulated. In addition, topographic images are simultaneously obtained together with the capacitive images. In this paper, feasibility of the quantitative capacitance determination is described. Experimental results with a silicon nitride film are compared with the theoretical curve. The effective electrode area (lateral resolution) and the tip-sample capacitance were calculated.

Citation Download Citation

Kazuya Goto and Kazuhiro Hane "Tapping mode scanning capacitance microscopy: feasibility of quantitative capacitance measurement", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); https://doi.org/10.1117/12.271216

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