Paper
15 April 1997 Bent-fiber near-field scanning optical microscopy probes for use with commercial atomic force microscopes
Roderick S. Taylor, Kurt E. Leopold, Mark A. Wendman, Gus Gurley, Virgil B. Elings
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Abstract
The adaptation of a Digital Instruments DimensionTM 3000 atomic-force microscope to provide a near-field scanning optical microscopy capability is described. The enabling technology for the adaptation is the bent optical fiber probe. The design and operation of this probe to measure evanescent fields emerging from optical waveguides is described.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Roderick S. Taylor, Kurt E. Leopold, Mark A. Wendman, Gus Gurley, and Virgil B. Elings "Bent-fiber near-field scanning optical microscopy probes for use with commercial atomic force microscopes", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); https://doi.org/10.1117/12.271220
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Cited by 9 scholarly publications.
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KEYWORDS
Waveguides

Near field scanning optical microscopy

Silicon

Near field

Near field optics

Optical fibers

Atomic force microscopy

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