Multiple-pulse damage thresholds of optical components for excimer lasers

Klaus R. Mann; Bernd Granitza; Eric Eva

doi:10.1117/12.274293

13 May 1997 Multiple-pulse damage thresholds of optical components for excimer lasers

Klaus R. Mann, Bernd Granitza, Eric Eva

Proceedings Volume 2966, Laser-Induced Damage in Optical Materials: 1996; (1997) https://doi.org/10.1117/12.274293
Event: Laser-Induced Damage in Optical Materials: 1996, 1996, Boulder, CO, United States

Abstract

For characterization of the long-term stability of UV optical components a set-up for determination of multiple- pulse damage thresholds has been developed. Using a high power excimer laser, 'S-on-1' damage thresholds were measured at 248nm for bare UV substrates as well as high- and anti-reflective dielectric coatings, indicating characteristic dependencies on the number of applied laser pulses and pulse repetition rates. It could be demonstrated that the multiple pulse threshold of dielectric coatings strongly depends on the thermal conductivity of the substrate. In addition, stability test were performed at 308nm on Al₂O₃/SiO₂HR coatings applying 10⁸ pulses of up to 400mJ/cm². Although the samples did withstand this long-term irradiation without damage, a slight degradation of the optical properties and a laser- induced contamination layer on the irradiated area were observed.

Citation Download Citation

Klaus R. Mann, Bernd Granitza, and Eric Eva "Multiple-pulse damage thresholds of optical components for excimer lasers", Proc. SPIE 2966, Laser-Induced Damage in Optical Materials: 1996, (13 May 1997); https://doi.org/10.1117/12.274293

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