Microbotics based on microphysics: design and control strategy based on attractive force reduction

Fumihito Arai; Toshio Fukuda

doi:10.1117/12.260622

11 December 1996 Microbotics based on microphysics: design and control strategy based on attractive force reduction

Fumihito Arai, Toshio Fukuda

Proceedings Volume 2906, Microrobotics: Components and Applications; (1996) https://doi.org/10.1117/12.260622
Event: Photonics East '96, 1996, Boston, MA, United States

Abstract

Recently, so many kinds of micro machines have been developed. Yet, the design and control methodology,of these micro machines is not well established. Difference of dimensions between the macro and micro world causes difference of the influential physical phenomena, motion of the objects, and relative change of the system performance between those worlds. To understand the physical phenomena in the micro world is very important to design, fabricate and control the micro robotic system. For example, attractive forces are dominant in the micro world compared with the gravitational force. Brownian motion is not negligible in the liquid. Since the dominating physical law is completely different between the macro and micro world, we must consider physics in the micro world in designing, fabricating, and controlling miniaturized objects. However, these problems have not been treated so seriously before. In this paper we present a new design and control strategy which will be essential for the microrobotics. Our approach is based on the attractive force reduction. Attractive force reduction methods are mainly focused in this paper. Application example to the micromanipulation is introduced and some experimental results are shown.

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Fumihito Arai and Toshio Fukuda "Microbotics based on microphysics: design and control strategy based on attractive force reduction", Proc. SPIE 2906, Microrobotics: Components and Applications, (11 December 1996); https://doi.org/10.1117/12.260622

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KEYWORDS

Adhesives

Optical spheres

Sensors

Electrodes

Silicon

Anisotropic etching

Physical phenomena

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