Multilevel 3D patterning of stacked PMMA sheets for x-ray microlithography

Gina M. Calderon; Kevin J. Morris; Olga Vladimirsky; Yuli Vladimirsky

doi:10.1117/12.250955

13 September 1996 Multilevel 3D patterning of stacked PMMA sheets for x-ray microlithography

Gina M. Calderon, Kevin J. Morris, Olga Vladimirsky, Yuli Vladimirsky

Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250955
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

This paper presents a novel technique for fabricating 3D patterns in a thick layered resist and describes an alignment aide designed for the specific application of thick resist x-ray micromachining. In this technique, a PMMA layer of desired thickness is formed on a substrate by spinning or solvent bonding. The layer is exposed with X- rays to generate a latent image. A second layer of PMMA is bonded over the first layer and is exposed with an appropriate mask, generating a latent image in the second layer. This process can be repeated several times creating a 3D latent image. Simultaneous development forms a true 3D pattern in the PMMA resist.

Citation Download Citation

Gina M. Calderon, Kevin J. Morris, Olga Vladimirsky, and Yuli Vladimirsky "Multilevel 3D patterning of stacked PMMA sheets for x-ray microlithography", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); https://doi.org/10.1117/12.250955

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available