LIGA-based family of tips for scanning probe applications

Sandeep Akkaraju; Yohannes M. Desta; BenQiang Li; Michael C. Murphy; Olga Vladimirsky; Yuli Vladimirsky

doi:10.1117/12.250951

13 September 1996 LIGA-based family of tips for scanning probe applications

Sandeep Akkaraju, Yohannes M. Desta, BenQiang Li, Michael C. Murphy, Olga Vladimirsky, Yuli Vladimirsky

Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250951
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

A LIGA based tool-set of tips for various scanning probe applications is under investigation by the LSU (mu) SET. This involves fabrication of `micro-columns' using LIGA, followed by an electrochemical sharpening process. Micro-columns ranging from 1.8 micrometers diameter and 14 micrometers tall to 165 micrometers X 165 micrometers and 1000 micrometers tall have been fabricated. In order to understand the sharpening mechanism, commercially available wires with diameters ranging from 25 - 800 micrometers were sharpened. A computer aided design tool, based on deforming finite elements, was developed to simulate the sharpening process.

Citation Download Citation

Sandeep Akkaraju, Yohannes M. Desta, BenQiang Li, Michael C. Murphy, Olga Vladimirsky, and Yuli Vladimirsky "LIGA-based family of tips for scanning probe applications", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); https://doi.org/10.1117/12.250951

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