Davies bar as the reference for impact acceleration metrology

Akira Umeda; Kazunaga Ueda

doi:10.1117/12.250943

13 September 1996 Davies bar as the reference for impact acceleration metrology

Akira Umeda, Kazunaga Ueda

Proceedings Volume 2880, Microlithography and Metrology in Micromachining II; (1996) https://doi.org/10.1117/12.250943
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

The mass production of silicon accelerometers has clarified that the current acceleration standard is not perfect. The acceleration standard is usually transferred by a reference accelerometer with the so-called back-to-back connection technique. Manufacturers, however do not explain what sort of calibration technique is applied to the reference accelerometer in the impact acceleration range. This paper proposes a novel impact technique for accelerometers calibration. The input acceleration to an accelerometer to be tested is generated by the reflection of an elastic pulse at one end surface of a bar. The bar is called Davies Bar, after Prof. Davies, who measured the dynamic displacement of the end surface of a metal bar by electrodes. The experiment was the comparison between the calibration of RION PV-44A accelerometer by ENDEVCO 2270 and that by NRLM method. The paper concludes that Davies' Bar should be used as the reference for the impact acceleration, ranging from roughly 200 [m/s²] to 1000,000 [m/s²] for mainly following reasons: (1) NRLM method is based on laser interferometer measurement with the reliable accuracy. (2) The frequency bandwidth of the impact acceleration generated using Davies bar is much wider than that of reference accelerometers. (3) Back to back connection does not always enable the comparison between the measurement of the connecting surface motion and the accelerometers' outputs.

Citation Download Citation

Akira Umeda and Kazunaga Ueda "Davies bar as the reference for impact acceleration metrology", Proc. SPIE 2880, Microlithography and Metrology in Micromachining II, (13 September 1996); https://doi.org/10.1117/12.250943

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