Release-etch modeling for complex surface-micromachined structures

William P. Eaton; James H. Smith; Robert L. Jarecki

doi:10.1117/12.251224

23 September 1996 Release-etch modeling for complex surface-micromachined structures

William P. Eaton, James H. Smith, Robert L. Jarecki

Proceedings Volume 2879, Micromachining and Microfabrication Process Technology II; (1996) https://doi.org/10.1117/12.251224
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

A release etch model for etching sacrificial oxides in aqueous HF solutions is presented. This model is an extension of work done by Monk et. al. and Liu et. al The model is inherently one dimensional, but can be used to model the etching of complex three dimensional parts. Solutions and boundary conditions are presented for a number of geometries.

Citation Download Citation

William P. Eaton, James H. Smith, and Robert L. Jarecki "Release-etch modeling for complex surface-micromachined structures", Proc. SPIE 2879, Micromachining and Microfabrication Process Technology II, (23 September 1996); https://doi.org/10.1117/12.251224

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