Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films

Valerie A. Ligachov; Anatolyi I. Popov; Sergei N. Stuokach

doi:10.1117/12.250939

13 September 1996 Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films

Valerie A. Ligachov, Anatolyi I. Popov, Sergei N. Stuokach

Author Affiliations +

Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250939
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

The following paper presents the results of morphology (columnar structure) and properties investigations of 0.2 - 0.4 mkm thick amorphous hydrogenated carbon (C:H) films, prepared by radio frequency (rf) sputtering of graphite target in argon-hydrogen mixture.

Citation Download Citation

Valerie A. Ligachov, Anatolyi I. Popov, and Sergei N. Stuokach "Morphology, composition, and properties of the amorphous hydrogenated carbon (C:H) films", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250939

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE