Superflat high-reflectivity semitransparent polarizer for soft x-ray

Tsuneyuki Haga; Marcia C. K. Tinone; Masaru Shimada; Takashi Ohkubo; Akira Ozawa

doi:10.1117/12.246192

16 August 1996 Superflat high-reflectivity semitransparent polarizer for soft x-ray

Tsuneyuki Haga, Marcia C. K. Tinone, Masaru Shimada, Takashi Ohkubo, Akira Ozawa

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246192
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

We have developed semi-transparent multilayer polarizers for polarimetry or ellipsometry in the soft x-ray region. We have studied the fabrication processes to achieve a flat and smooth freestanding reflection surface for high-performance semi-transparent multilayer beam-splitters, mainly the stress control of Mo/Si multilayer films and the surface roughness of the support membrane. In this work, we verified that these processes can be applicable to fabricate not only beam-splitters but also polarizers with high reproducibility. The flatness of 1.1 nm (rms) was obtained in the active area of a 11 mm square semi-transparent multilayer polarizer. The measured reflectivity and transmittance rates for s-polarization using synchrotron radiation were 45.3% and 5.6%, respectively, at a wavelength of 13.9 nm. We estimated the polarization characteristics by calculating its relative reflectivity, relative transmittance and phase shift for polarization experiments. As a result of the calculation, we verified that the fabricated semi-transparent multilayer polarizers can be adequately used as a polarizer with polarizance of 69.5% and high throughput of 28.9%, or as a phase shifter of 68 degrees with equal transmission ratio and high throughput of 4.9% for x-ray polarimetry or ellipsometry.

Citation Download Citation

Tsuneyuki Haga, Marcia C. K. Tinone, Masaru Shimada, Takashi Ohkubo, and Akira Ozawa "Superflat high-reflectivity semitransparent polarizer for soft x-ray", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246192

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