Surface measurement of optical cylinder using multiaperture overlap-scanning technique (MAOST)

Weiming Cheng; Mingyi Chen

doi:10.1117/12.276321

17 July 1996 Surface measurement of optical cylinder using multiaperture overlap-scanning technique (MAOST)

Weiming Cheng, Mingyi Chen

Proceedings Volume 2860, Laser Interferometry VIII: Techniques and Analysis; (1996) https://doi.org/10.1117/12.276321
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Multiaperture overlap-scanning technique (MAOST) has been successfully used to measure larger optical flat with a smaller reference flat. This paper extends the technique to measure an optical cylinder. Utilizing the information in overlap area between subapertures, MAOST connects them to one aperture called full aperture. With the technique, half a cylinder or even a whole cylinder can be accurately measured. In the paper, the fundamental is discussed, mathematical model is given and connection results of 2 interferograrns and 17 interferograms are shown. Results indicate that the error in principle of the method is about the order of 108 A

Citation Download Citation

Weiming Cheng and Mingyi Chen "Surface measurement of optical cylinder using multiaperture overlap-scanning technique (MAOST)", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); https://doi.org/10.1117/12.276321

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available