Scanning probe microscopy and how it can be utilized in the manufacture of diffraction gratings

Bernhard W. Bach

doi:10.1117/12.259873

22 November 1996 Scanning probe microscopy and how it can be utilized in the manufacture of diffraction gratings

Bernhard W. Bach

Proceedings Volume 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II; (1996) https://doi.org/10.1117/12.259873
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Ruled diffraction gratings and even holographic ones have a `surface texture' or an `inherent roughness' that is part of the grating making process. Using the new scanning probe microscopy (SPM), we can now see the structure that has been long suspected but not revealed using scanning electron microscopy. Also using the SPM, we can review the surface structure in the film prior to ruling as well as after. Gaining this experience, we have been able to make adjustments to the diamond tool and weight to improve the final products.

Citation Download Citation

Bernhard W. Bach "Scanning probe microscopy and how it can be utilized in the manufacture of diffraction gratings", Proc. SPIE 2856, Optics for High-Brightness Synchrotron Radiation Beamlines II, (22 November 1996); https://doi.org/10.1117/12.259873

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