Phase modulation methods of interferometry

Ilya Sh. Etsin; Lev N. Butenko

doi:10.1117/12.250796

18 September 1996 Phase modulation methods of interferometry

Ilya Sh. Etsin, Lev N. Butenko

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250796
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

Interferometric methods of sinusoidal, single-frequency phase modulation and two-frequency phase modulation have been investigated and compared as applied to displacement measurements and wavefront testing. A procedure of an experimental estimation of the periodic error which is a basic component of a systematic error of interferometric systems is developed. It is shown that the conventional single-frequency phase modulation method is preferable when it is desirable to have extreme resolution or maximum accuracy, while the method of two-frequency phase modulation will be more rational when small dimensions and weight of the device are of basic concern.

Citation Download Citation

Ilya Sh. Etsin and Lev N. Butenko "Phase modulation methods of interferometry", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250796

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