Micromeasurements: a challenge for photomechanics

Malgorzata Kujawinska; Ryszard J. Pryputniewicz

doi:10.1117/12.250743

18 September 1996 Micromeasurements: a challenge for photomechanics

Malgorzata Kujawinska, Ryszard J. Pryputniewicz

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250743
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

Modern Micro Electro Mechanical Systems (MEMS) place ever increasing dependence on miniaturization of components and rely on computational and experimental methods to reach their objectives. This miniaturization requires a detailed knowledge of micromechanical behavior of materials used in development of the components and emphasizes design validation of finished products. This information is provided by electronic holography and grating interferometry used as full field, noninvasive experimental techniques. The usefulness of these methods is shown on several examples including determination of local material properties, stress, relaxation of microelements and dynamic characteristic study of MEMS.

Citation Download Citation

Malgorzata Kujawinska and Ryszard J. Pryputniewicz "Micromeasurements: a challenge for photomechanics", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250743

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available