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18 September 1996 Equivalent wavelength interferometry using diffractive optics
Peter J. de Groot
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Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250773
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
When two beams of an interferometer are directed to the same object at different incident angles, the recombined, reflected beams generate an interference pattern with a large equivalent wavelength. This paper reviews the basic principles of these `desensitized' interferometers, and describes a novel diffractive geometry that is particularly well adapted to manufacturing applications, thanks to its large working distance, achromatism and high accuracy.
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Peter J. de Groot "Equivalent wavelength interferometry using diffractive optics", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250773
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KEYWORDS
Interferometry
Optics manufacturing
Interferometers
Manufacturing
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