Plasma-ion-assisted deposition: investigation of film stress

Alfons Zoeller; Rainer Goetzelmann; K. Matl

doi:10.1117/12.246816

19 August 1996 Plasma-ion-assisted deposition: investigation of film stress

Alfons Zoeller, Rainer Goetzelmann, K. Matl

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246816
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

In many applications in the field of optical coatings low dimensions and low weight of the substrates are of increasing importance. Organic substrate materials or thin glass substrates are used in many cases. Due to the low mechanical stability, these substrates are very sensitive against bending caused by the stress of the coatings. The stress of optical coatings deposited with plasma-IAD with the APS (advanced plasma source) was investigated. Based on the bending radius of coated thin glass substrates stress values were evaluated. It was found, that film stress can be influenced significantly with the deposition parameters and the use of the coating starting materials. The results of single layer coatings of various dielectric materials and completed multilayer systems are given.

Citation Download Citation

Alfons Zoeller, Rainer Goetzelmann, and K. Matl "Plasma-ion-assisted deposition: investigation of film stress", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246816

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available