Ellipsometric Configurations And Techniques

R. M. A. Azzam

doi:10.1117/12.931704

30 April 1981 Ellipsometric Configurations And Techniques

R. M. A. Azzam

Proceedings Volume 0276, Optical Characterization Techniques for Semiconductor Technology; (1981) https://doi.org/10.1117/12.931704
Event: 1981 Microlithography Conferences, 1981, San Jose, United States

Abstract

Classical and new ellipsometric configurations and techniques are briefly reviewed. This includes null and photometric ellipsometry; azimumetry (ellipsometry based on azimuth measurements alone); film-substrate ellipsometry based upon detection of special values of ψ and Δ at certain angles of incidence; surface-modulated ellipsometry and AIDER (angle-of-incidence derivative ellipsometry and reflectometry).

Citation Download Citation

R. M. A. Azzam "Ellipsometric Configurations And Techniques", Proc. SPIE 0276, Optical Characterization Techniques for Semiconductor Technology, (30 April 1981); https://doi.org/10.1117/12.931704

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