Scanning optical microscope integrated in a wafer stepper for image sensing

Manfred G. Tenner

doi:10.1117/12.240116

21 May 1996 Scanning optical microscope integrated in a wafer stepper for image sensing

Manfred G. Tenner

Proceedings Volume 2725, Metrology, Inspection, and Process Control for Microlithography X; (1996) https://doi.org/10.1117/12.240116
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

Latent image phase gratings can be used for alignment purposes and monitoring the performance of wafer steppers. Scanning optical microscopy is a sensitive method to measure the phase contrast as well as the reflectivity contrast of such gratings. The contrast depends on the conversion of the photo active component in the photo resist. Therefore, parameters influencing this conversion, such as focussing conditions, exposure dose, and the efficiency of coupling light into the photo resist, can be monitored. Examples of measuring best focus, the rate constant of the conversion for the photo active component, and the exposure dose dependence of the photo resist are presented. In light of its excellent performance a scanning optical microscope integrated in a wafer stepper is a useful tool in monitoring the lithographic process.

Citation Download Citation

Manfred G. Tenner "Scanning optical microscope integrated in a wafer stepper for image sensing", Proc. SPIE 2725, Metrology, Inspection, and Process Control for Microlithography X, (21 May 1996); https://doi.org/10.1117/12.240116

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available