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A hot and dense plasma produced from a laser-irradiated gas puff target, created by pulsed injection of gas with a solenoid valve, offers the possibility to realize a debrisless x-ray point source for the x-ray lithography applications. This paper reports experimental investigations on the x-ray generation in 1-keV photon-energy range from a high-pressure gas puff xenon target irradiated with a laser pulse of 1-ns duration at intensities of about 1013 Wcm-2. X-ray output in this range for the gas puff xenon target, estimated from the measurements made using the semiconductor detectors, was higher than x-ray output for a solid tellurium or iron target measured for the same conditions.
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Henryk Fiedorowicz, Andrzej Bartnik, Jerzy Kostecki, Miroslaw Szczurek, "Debrisless laser-produced x-ray source with a gas puff target," Proc. SPIE 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, (27 May 1996); https://doi.org/10.1117/12.240482