Flexure-beam micromirror devices and potential expansion for smart micromachining

Tseng-Hwang Lin

doi:10.1117/12.240456

20 May 1996 Flexure-beam micromirror devices and potential expansion for smart micromachining

Tseng-Hwang Lin

Proceedings Volume 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS; (1996) https://doi.org/10.1117/12.240456
Event: 1996 Symposium on Smart Structures and Materials, 1996, San Diego, CA, United States

Abstract

Texas Instruments has been developing both digital and analog micromirror devices since the late 1970s. The analog flexure-beam micromirror devices are primarily targeted for imaging identification. Digital multiplexing mechanisms are used in column and row selection to address discretized analog signals into the array. Amplifiers and sample-and-hold circuits provide the appropriate signal range to control the micromirrors. Analog-to-digital and digital- to-analog conversions are currently built into the interface electronics, and will potentially be built into the chip. The micromirror devices are built on the top of the addressing circuits using sacrificial layers and two different metal layers. This concept of surface micromachining and mixed-signal circuit integration enables us to investigate the possibility of smart micromachining. Micromirror device applications can expand beyond optical applications into microsensor and other microactuator areas. The addressing circuits can be used in the interface of analog real-world and smart control circuits.

Citation Download Citation

Tseng-Hwang Lin "Flexure-beam micromirror devices and potential expansion for smart micromachining", Proc. SPIE 2722, Smart Structures and Materials 1996: Smart Electronics and MEMS, (20 May 1996); https://doi.org/10.1117/12.240456

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