UV FEL light source for industrial processing

Michael J. Kelley; H. Frederick Dylla; George R. Neil; Leonard J. Brillson; Daniel P. Henkel; Henry Helvajian

doi:10.1117/12.237725

8 April 1996 UV FEL light source for industrial processing

Michael J. Kelley, H. Frederick Dylla, George R. Neil, Leonard J. Brillson, Daniel P. Henkel, Henry Helvajian

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237725
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

Short-wavelength UV light is strongly absorbed by most materials, creating the opportunity to drive near-surface thermal or chemical processes. The resulting modifications have a wide range of prospective applications, but few have been developed because of the low capacity and high unit cost of light from present sources. We analyze the light source requirements for large-scale applications to polymers and metals. We describe meeting them with free electron laser whose design is described in a companion paper in this session. This machine will deliver 1.0 to 2.5 kW between 190 nm and 350 nm with options in the visible and IR, and serve to further develop FEL technology for much higher powered machines. We gratefully acknowledge support for this work from the Commonwealth of Virginia Center for Innovative Technologies and The U.S. Department of Energy.

Citation Download Citation

Michael J. Kelley, H. Frederick Dylla, George R. Neil, Leonard J. Brillson, Daniel P. Henkel, and Henry Helvajian "UV FEL light source for industrial processing", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237725

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available