Novel photorefractive sensing device for laser surface inspection

Akira Shiratori; Minoru Obara

doi:10.1117/12.237730

8 April 1996 Novel photorefractive sensing device for laser surface inspection

Akira Shiratori, Minoru Obara

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237730
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

We have developed a novel photorefractive sensing device using the hologram storage characteristic of a photorefractive barium titanate crystal. This device is capable of observing surface structures of precisely machined work, and we demonstrated surface sensing and inspection using samples. The angular resolution of this device depended on the angular aperture of the Bragg diffraction of the gratings inside the crystal, and resolution as high as submilliradian is expected.

Citation Download Citation

Akira Shiratori and Minoru Obara "Novel photorefractive sensing device for laser surface inspection", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237730

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