Automated beam manipulation in UV laser systems

Warren O. Jackson; Jay A. Guerette

doi:10.1117/12.237748

8 April 1996 Automated beam manipulation in UV laser systems

Warren O. Jackson, Jay A. Guerette

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237748
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

The unique challenges of UV laser micromachining require an advanced approach to beam shaping and steering to maximize beam utilization and efficiency. As UV laser systems used in manufacturing proliferate, it is also important to streamline optical setup and operation, and move towards automation. We will discuss the use of motor and actuator control in beam delivery, and how these tools, such as motorized imaging or turning optics, and mask or shaping devices, enable UV laser systems to become more powerful and flexible, yet remain simple to use.

Citation Download Citation

Warren O. Jackson and Jay A. Guerette "Automated beam manipulation in UV laser systems", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237748

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