Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon

S. Iraj Najafi; C.-Y. Li; J. E. Chisham; Mark P. Andrews; Paul Coudray; Alireza Malek-Tabrizi; Nasser Peyghambarian

doi:10.1117/12.229957

10 January 1996 Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon

S. Iraj Najafi, C.-Y. Li, J. E. Chisham, Mark P. Andrews, Paul Coudray, Alireza Malek-Tabrizi, Nasser Peyghambarian

Proceedings Volume 2695, Functional Photonic and Fiber Devices; (1996) https://doi.org/10.1117/12.229957
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

We describe a new simplified process for inexpensive fabrication of low-loss (0.1 dB/cm) glass waveguides on silicon by ultraviolet light imprinting in photosensitive, organically modified sol-gel silica glass films prepared by one-step dip-coating process. The fabrication process is appealing because the buffer layer between waveguide and substrate is eliminated, and waveguides can be made in a few steps using low-cost equipment.

Citation Download Citation

S. Iraj Najafi, C.-Y. Li, J. E. Chisham, Mark P. Andrews, Paul Coudray, Alireza Malek-Tabrizi, and Nasser Peyghambarian "Ultraviolet-light-imprinted sol-gel silica glass channel waveguides on silicon", Proc. SPIE 2695, Functional Photonic and Fiber Devices, (10 January 1996); https://doi.org/10.1117/12.229957

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