Photoluminescent and infrared Fourier diagnostics of porous silicon exposed to HF destructive etching

Galina Yu. Rudko; Tamara Ya. Gorbach; Petr S. Smertenko; Sergey V. Svechnikov; Mikhail Ya. Valakh; Vladimir V. Bondarenko; Alexandr Dorofeev

doi:10.1117/12.226185

3 November 1995 Photoluminescent and infrared Fourier diagnostics of porous silicon exposed to HF destructive etching

Galina Yu. Rudko, Tamara Ya. Gorbach, Petr S. Smertenko, Sergey V. Svechnikov, Mikhail Ya. Valakh, Vladimir V. Bondarenko, Alexandr Dorofeev

Author Affiliations +

Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226185
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine

Abstract

Photoluminescence (PL) and Fourier transform infrared spectroscopy (FTIR) have been used to characterize porous silicon layers (PSL) exposed to HF destructive etching. The results obtained lend support to the view that chemical passivation, in particular by oxygen, is the major factor which controls the origin of PL. The PL intensity and the PL shift are ascribed to the changes in hydrogen and oxygen termination of pores.

Citation Download Citation

Galina Yu. Rudko, Tamara Ya. Gorbach, Petr S. Smertenko, Sergey V. Svechnikov, Mikhail Ya. Valakh, Vladimir V. Bondarenko, and Alexandr Dorofeev "Photoluminescent and infrared Fourier diagnostics of porous silicon exposed to HF destructive etching", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); https://doi.org/10.1117/12.226185

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available