Optical properties and structure of ion-implanted metal films on crystalline lithium niobate

Olegh V. Vakulenko; Vasyl S. Staschuk; Borys M. Roman'uk; Mykola I. Kl'uy

doi:10.1117/12.226153

3 November 1995 Optical properties and structure of ion-implanted metal films on crystalline lithium niobate

Olegh V. Vakulenko, Vasyl S. Staschuk, Borys M. Roman'uk, Mykola I. Kl'uy

Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226153
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine

Abstract

The structure and optical properties of nickel and palladium-films on crystalline lithium niobate were studied with the help of an electron microscope, an infrared spectrometer, and an ellipsometer. The optical properties of two-layer systems: ion-implanted metal film (10 - 50 nm thick) pyroelectric (crystalline lithium niobate 0.2 mm thick with the spontaneous polarization vector perpendicular to the surface) were studied by measuring the reflectivity in the wavelength region of 0.7 - 15 micrometers. The systems were argon-ion-implanted with ion energies from 50 to 500 keV. The absorbed irradiation dose varied from 10¹⁵ to 5 (DOT) 10¹⁷ ion/cm². After bombarding the surfaces of the nickel-film-systems, the reflectivity almost has not changed over the entire wavelength range, although certain selectivity disappeared, which was due to agitation of the film-pyroelectric interface. We found a striking implantation effect on palladium films, which consisted in abrupt decrease in the reflectivity and in disappearance of the selectivity in a rather wide spectral region of 1 - 15.1 micrometers. The described effect depends considerably on the energy, absorbed dose, and the film thickness. Electron microscopic and elipsometric studies show that the cause of the described effects lay in different changes in both the structure of the near-surface layers and the state of the palladium and nickel film surfaces.

Citation Download Citation

Olegh V. Vakulenko, Vasyl S. Staschuk, Borys M. Roman'uk, and Mykola I. Kl'uy "Optical properties and structure of ion-implanted metal films on crystalline lithium niobate", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); https://doi.org/10.1117/12.226153

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KEYWORDS

Nickel

Palladium

Reflectivity

Ions

Lithium niobate

Crystals

Optical properties

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