Optical diagnostics of thermoplastic dielectric and semiconductor material in thin layers

Sergey A. Voronov; Oleg Borisovich Katkovskiy; Sergey Alexandrov Neduzhiy; Alexander Vladimirov Solovyov; Yuriy Georgievic Statnikov

doi:10.1117/12.226130

3 November 1995 Optical diagnostics of thermoplastic dielectric and semiconductor material in thin layers

Sergey A. Voronov, Oleg Borisovich Katkovskiy, Sergey Alexandrov Neduzhiy, Alexander Vladimirov Solovyov, Yuriy Georgievic Statnikov

Author Affiliations +

Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226130
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine

Abstract

The method and installation for defining the dynamic viscosity coefficient, electric resistance coefficient, in thin layers of dielectric and semiconductor materials in stringy state are represented.

Citation Download Citation

Sergey A. Voronov, Oleg Borisovich Katkovskiy, Sergey Alexandrov Neduzhiy, Alexander Vladimirov Solovyov, and Yuriy Georgievic Statnikov "Optical diagnostics of thermoplastic dielectric and semiconductor material in thin layers", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); https://doi.org/10.1117/12.226130

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