Process design for manufacturability of GaAs MESFET integrated circuit using statistical experimental design techniques

Jian S. Wang; C. C. Teng; J. R. Middleton; Peter J. Apostolakis; Milton Feng

doi:10.1117/12.221451

22 September 1995 Process design for manufacturability of GaAs MESFET integrated circuit using statistical experimental design techniques

Jian S. Wang, C. C. Teng, J. R. Middleton, Peter J. Apostolakis, Milton Feng

Author Affiliations +

Proceedings Volume 2635, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis; (1995) https://doi.org/10.1117/12.221451
Event: Microelectronic Manufacturing '95, 1995, Austin, TX, United States

Abstract

A manufacturable, directly ion implanted 0.6 micrometers GaAs metal- semiconductor field-effect transistors (MESFET) and metal-semiconductor- metal (MSM) based opto-electronic integrated circuit (OEIC) process has been developed and optimized for low cost optical data link applications. Key steps in the OEIC process have been identified and statistically quantifiable process modules have been obtained to optimize the circuit performance and achieve high process yield. The statistically significant transfer characteristics of each process module was obtained through design of experiment (DOE) and response surface modeling (RSM), by utilizing both experimental data and data from experimentally calibrated process simulators. This paper discusses the PECVD Si₂N₄ process module optimization and the backgating effects in GaAs ICs.

Citation Download Citation

Jian S. Wang, C. C. Teng, J. R. Middleton, Peter J. Apostolakis, and Milton Feng "Process design for manufacturability of GaAs MESFET integrated circuit using statistical experimental design techniques", Proc. SPIE 2635, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis, (22 September 1995); https://doi.org/10.1117/12.221451

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available