Integrated transducer systems

Marek Syrzycki; M. Parameswaran; Glenn H. Chapman

doi:10.1117/12.213135

30 June 1995 Integrated transducer systems

Marek Syrzycki, M. Parameswaran, Glenn H. Chapman

Proceedings Volume 2634, Optoelectronic and Electronic Sensors; (1995) https://doi.org/10.1117/12.213135
Event: Optoelectronic and Electronic Sensors, 1994, Warsaw-Zegrze, Poland

Abstract

In the paper we discuss possible solutions to problems pertaining the implementation of integrated transducer systems, based on examples of WSI image transducers, magnetic field sensors and tactile sensors arrays, as well as arrays of chemical sensors. We also present the issues common to large area transducer arrays, such as building-in redundancy into WSI transducer arrays, and frequency domain circuits for the future communication pathway in integrated transducer systems. Advantages of standard CMOS technology, enhanced with various post-fabrication processes such as silicon micromachining and laser linking, are also stressed.

Citation Download Citation

Marek Syrzycki, M. Parameswaran, and Glenn H. Chapman "Integrated transducer systems", Proc. SPIE 2634, Optoelectronic and Electronic Sensors, (30 June 1995); https://doi.org/10.1117/12.213135

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