Next-generation mask strategy: accuracy and mask-size survey and discussion results at PMJ '95 rump session

Yoshihiro Todokoro; Hiroaki Morimoto

doi:10.1117/12.228173

8 December 1995 Next-generation mask strategy: accuracy and mask-size survey and discussion results at PMJ '95 rump session

Yoshihiro Todokoro, Hiroaki Morimoto

Author Affiliations +

Proceedings Volume 2621, 15th Annual BACUS Symposium on Photomask Technology and Management; (1995) https://doi.org/10.1117/12.228173
Event: 15th Annual BACUS Symposium on Photomask Technology and Management '95, 1995, Santa Clara, CA, United States

Abstract

We report here survey and discussion results on mask accuracy and mask size at the 1995 PMJ (Photomask Japan) Rump Session. The questionnaires consist of mask size, lithography error budget, and mask error budget for 64M DRAM, 256M DRAM, and 1G DRAM. The number of replies was 52, 26 in advance and 26 on site. Seven panelists presented short papers on mask accuracy from the technical fields of device, lithography, mask making, and mask- related equipment. The discussion results of panelists also are shown.

Citation Download Citation

Yoshihiro Todokoro and Hiroaki Morimoto "Next-generation mask strategy: accuracy and mask-size survey and discussion results at PMJ '95 rump session", Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); https://doi.org/10.1117/12.228173

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available